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|a9781849962537 (paper)
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020 |
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|a9781849962544 (electronic bk.)
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|aTA418.9.N35|bG36 2010|cG211
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|aTA418.9.N35|bG211 2010
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|pEB|dTA418.9.N35|eG211|y2010
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100 |
1
|
|aGao, Wei.
|
245 |
10
|
|aPrecision nanometrology|h[electronic resource] :|bsensors and measuring systems for nanomanufacturing /|cby Wei Gao.
|
260 |
|
|aLondon :|bSpringer-Verlag London,|c2010.
|
300 |
|
|axiii, 354 p. :|bill., digital ;|c24 cm.
|
440 |
0
|
|aSpringer series in advanced manufacturing,|x1860-5168
|
650 |
0
|
|aNanostructured materials|xMeasurement.
|
650 |
14
|
|aEngineering.
|
650 |
24
|
|aControl , Robotics, Mechatronics.
|
650 |
24
|
|aManufacturing, Machines, Tools.
|
650 |
24
|
|aMeasurement Science and Instrumentation.
|
650 |
24
|
|aNanotechnology.
|
710 |
2
|
|aSpringerLink (Online service)
|
773 |
0
|
|tSpringer eBooks
|
856 |
40
|
|uhttp://dx.doi.org/10.1007/978-1-84996-254-4
|
950 |
|
|aEngineering (Springer-11647)
|
856 |
40
|
|uhttp://dx.doi.org/10.1007/978-1-84996-254-4
|