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|aTK7875|b.S478 2001
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|aSenturia, Stephen D.
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|aMicrosystem design|h[electronic resource] /|cStephen D. Senturia.
|
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|aBoston :|bKluwer Academic Publishers,|cc2001.
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|
|axxvi, 689 p. :|bill., digital ;|c24 cm.
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|aMicroelectromechanical systems|xDesign and construction.
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|
|aMicroelectronics.
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|aSystem design.
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|tSpringer e-books
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|uhttp://dx.doi.org/10.1007/b117574
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|aEngineering
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|uhttp://dx.doi.org/10.1007/b117574
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